application:
•Parts for semiconductor equipments
Wafer Table(Vacuum Chuck), Electrostatic Chuck, End Effector, Clamp Ring, various parts with anti-plasma property
•Large anti-abrasive parts for powder process equipment
•High sphericity ball(High purity alumina, Zirconia, etc.):check valve for pump
•Heat-resisting parts,Ultra precise parts,Large parts,Mechanical seal,etc.